Tabletop Maskless Aligner System
SLAC National Accelerator Laboratory (operated by Stanford for the DOE) is requesting a fixed-price quote for one tabletop maskless aligner system, to be delivered and installed at its Menlo Park, CA facility. The system must meet specified technical requirements, including dual exposure modes, minimum feature size =0.6 µm, overlay accuracy =1 µm, vacuum chuck handling from 5 mm to 6-inch substrates, and native CAD format support, with US-based service support, installation, and training included. Delivery is required within no more than 6 months, and source selection will use the Lowest Price Technically Acceptable (LPTA) method. Offerors must complete required representations and certifications, including the Buy American Act certification if applicable, and register in SAM. SLAC’s fixed-price terms and conditions will apply, with NET-30 payment and FOB destination prepaid freight.