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Acquisition of a deposition and analysis cluster tool that combines various techniques into one instrument. Combining automated deposition (atomic layer deposition, reactive sputtering, electron beam ... Acquisition of a deposition and analysis cluster tool that combines various techniques into one instrument. Combining automated deposition (atomic layer deposition, reactive sputtering, electron beam evaporation) and fabrication (ion etching) techniques with in-depth materials characterization will enable the use of machine learning algorithms to reveal complex process interactions that play a significant role in device performance, but cannot be correlated through traditional experimental methods. The ability to perform core fabrication processes via robotic control will significantly enhance user throughput while reducing staff oversight and time investment.