Inactive

Brookhaven Science Associates (BSA) supports the Nanoscale Science Research Center Recapitalization project (NSRC-Recap) which is adding new and updated capabilities to the Department of Energy’s nano... Brookhaven Science Associates (BSA) supports the Nanoscale Science Research Center Recapitalization project (NSRC-Recap) which is adding new and updated capabilities to the Department of Energy’s nanoscience infrastructure. As part of this work, BSA is potentially seeking to acquire a Load Locked, Silicon Deep Reactive Ion Etch Reactor (SiDRIE) at the Center for Integrated Nanotechnologies (CINT) at Sandia National Laboratories (SNL). The SiDRIE reactor supports microfabrication efforts for highly selective, precision etching of single crystal silicon and Silicon On Insulator (SOI) materials for the development of Mid-Infrared Photonics, MEMS and other advanced material research activities. Dual purpose Si etch capability, providing both high speed time-multiplexed, high aspect ratio/through wafer etch and plasma dicing, and also shallow etching of crystalline silicon structures in the sub-micron region with high precision. The new system will include a single 100-200mm transfer chamber, a heated reaction chamber that includes a high power inductively coupled plasma unit, a heated/CW and Pulsed LF biasing electrode with associated gas delivery, vacuum and cooling systems, optical emissions spectrometry and laser interferometry. BSA invites you to participate in accordance with the RFI letter and all supporting attachments. This requirement has been posted on the SAM.gov website under solicitation RFI-417070A . The response due date is July 15, 2022 at 4:30PM. Any questions concerning this RFI must be addressed via email to the attention of Nick D’Abbraccio (ndabbracc@bnl.gov).