Kinoform Beam Splitter: Nanostructured Silicon Grating for beam splitting with the following paramenters: Pitch: 150nm Design energy: 9600 eV Contrast material: Silicon Grating structure on chip: ~500... Kinoform Beam Splitter: Nanostructured Silicon Grating for beam splitting with the following paramenters: Pitch: 150nm Design energy: 9600 eV Contrast material: Silicon Grating structure on chip: ~500 um x 4000 um Structure height: 5 um Substrate frame size: 15 mm x 15 mm Substrate membrance material: Silicon

Kinoform Beam Splitter: Nanostructured Silicon Grating for beam splitting with the following paramenters: Pitch: 150mm Design energy: 9600 eV Contrast material: Silicon Grating structure on chip: ~500... Kinoform Beam Splitter: Nanostructured Silicon Grating for beam splitting with the following paramenters: Pitch: 150mm Design energy: 9600 eV Contrast material: Silicon Grating structure on chip: ~500 um x 4000 um Structure height: 5 um Substrate frame size: 15 mm x 15 mm Substrate membrance material: Silicon