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Request for Information (RFI) 428027 Electron Beam Lithography System This is a REQUEST FOR INFORMATION (RFI) NOTICE open to all companies that meet all the requirements/specifications of the attached... Request for Information (RFI) 428027 Electron Beam Lithography System This is a REQUEST FOR INFORMATION (RFI) NOTICE open to all companies that meet all the requirements/specifications of the attached RFI document for this Electron Beam Lithography System requirement. This RFI is for information and planning purposes only and is not to be construed as a commitment by the U.S. Government, nor will the U.S. Government pay for information solicited. The information from this notice will help the Department of Energy (DOE) survey available resources. PLEASE NOTE THAT THIS IS NOT A REQUEST FOR PROPOSAL, NO SOLICITATION EXISTS AT THIS TIME. Brookhaven Science Associates, LLC (herein known as “BSA”), operator of Brookhaven National Laboratory (BNL) under a Prime Contract with the U.S. Department of Energy (DOE) herewith requests your budgetary quote and capabilities, as outlined in the attached RFI document for this Electron Beam Lithography System requirement. The information being solicited includes, but is not limited to, the following: a) Indication of your interest in bidding on the services outlined in the attached RFI document. b) A brief Statement of Capabilities detailing how your company meets the requirements outlined in the attached RFI document. c) Answers to the questions stated in the attached RFI document. d) Rough order of magnitude pricing and/or budgetary quotation. Submittals must be received by BSA no later than close of business, 5:00 PM Eastern Time, on March 15, 2023. Any information received after this time and date may not be considered. BSA prefers electronic submissions of information. Electronic submissions will be accepted by the following method: • Email submissions must include the information noted above. Emails shall be sent to lgonzales@bnl.gov with “BSA RFI-428027” in the subject line. We trust that the information contained herein is sufficient to permit your company to prepare a submittal outlining your capabilities, however, should you have any questions, please direct questions to the email address listed above. All questions must be submitted via email. The purpose of this amendment to RFI 428027 is to provide all potential offerors with answers to questions received in response to the RFI. Please see Questions and Answers below. 1. Question: What are the main applications intended for the tool? Answer: Photonics, Quantum Physics, Microfluidic and Microelectronics Research. 2. Question: What are the most important performance criteria expected of the tool? Answer: Evaluation criteria, and any weight assigned to the evaluation criteria, would be provided in any resultant RFP, if any. BSA would like to reiterate that this is a Request for Information only. This is not a request for proposal and no solicitation exists at this time. 3. Question: Is 200kV necessary as an option? Answer: This is a Request for Information. All that is being requested at this time is potential offerors’ capabilities statements that reflect current and potential capabilities. 4. Question: How important are user interface, software automation, time to become proficient in use of the system? Answer: Evaluation criteria, and any weight assigned to the evaluation criteria, would be provided in any resultant RFP, if any. BSA would like to reiterate that this is a Request for Information only. This is not a request for proposal and no solicitation exists at this time. 5. Question: The requirement is for one EBL system, correct? Or is it for two? Answer: This potential requirement will be for one system. BSA would be acquiring on behalf of Sandia National Laboratories. 6. Question: What additional offerings/options should I include in my Rough Order of Magnitude (ROM) pricing? Answer: Please provide a rough order of magnitude pricing based on the RFI posted to SAM.gov. You may include any additional assumptions. This rough order of magnitude pricing will be used for research purposes only as we are still in the market research phase of the subject requirement.