Inactive

The Government requires one (1) nanoimprint lithography system in accordance with the following specifications: Shall have a personal computer (PC) controlling nanoimprint lithography system. Shall ha... The Government requires one (1) nanoimprint lithography system in accordance with the following specifications: Shall have a personal computer (PC) controlling nanoimprint lithography system. Shall have ultraviolet (UV) imprinting with 365 nanometer (nm) UV light with power output capability of a minimum of 100 milliwatt (mW)/squared centimeters (cm2). Shall have UV imprinting with 405nm UV light with power output capability of a minimum 100mW/cm2. Shall have a Thermal imprinting at controllable temperatures up to a maximum 250 degrees (°) Celsius (C). Shall have a temperature control of a minimum of +/-1°C. Shall have a simultaenous UV/thermal imprint processing capabilities. Shall have a heating element engineered for direct replacement. Shall have pressure membranes engineered for direct replacement. Shall have a controllable imprint pressure with a minimum of 0.3 bar and a maximum of 11 bar. Shall have automated pressure control. Shall have a process substrates maximum of 120mm diameter. Shall have process samples and substrates with a minimum height of 20mm. Shall have an imprint resolution feature size minimum of 40nm. Shall have an integrated vacuum pump system. Shall have a minimum of (2) master stamps with test structures Shall have a minimum of (1) spare heating element Shall have a minimum of (3) spare pressure membranes for thermal imprinting Shall have a minimum of (3) spare pressure membrances for UV imprinting Shall have a minimum of (10) TOPAS foils for hot embossing Shall have a minimum of (10) Polytetrafluoroethylene (PTFE) foils for membrane protection Shall have Command & Control available directly from supplied PC. Shall have the capability to create, store, and execute imprinting protocols. Shall have a fully automated imprinting p rocess controlled from software. Shall have an automatic system calibration. Shall have a minimum of (1) day of virtual training. Shall include freight, shipping and handling to Aberdeen Proving Ground