One (1) cluster deposition system with double radial distribution chamber (RDC) configuration and one (1) X-Ray Photoelectron Spectroscopy (XPS) characterization system
COMBO SYNOPSIS SOLICITATION FOR COMMERCIAL ITEMS 1. Class Code: 6640 2. NAICS Code: 334516 3. Subject: One (1) cluster deposition system with double radial distribution chamber (RDC) configuration and... COMBO SYNOPSIS SOLICITATION FOR COMMERCIAL ITEMS 1. Class Code: 6640 2. NAICS Code: 334516 3. Subject: One (1) cluster deposition system with double radial distribution chamber (RDC) configuration and one (1) X-Ray Photoelectron Spectroscopy (XPS) characterization system 4. Solicitation Number: W911QX-21-Q-0175. 5. Set-Aside Code: N/A 6. Response Date: 30 Days from posting 7. Place of Delivery/Performance: U.S. Army Research Laboratory 2800 Powder Mill Road Adelphi MD 20783, U.S.A. 8. (i) This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (ii) The solicitation number is W911QX-21-Q-0175. This acquisition is issued as a request for quotation (RFQ). (iii) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2021-06. (iv) The associated NAICS code is 334516. The small business size standard is 1000 employees. (v) The following is a list of contract line item number(s) and items, quantities and units of measure, (including option(s), if applicable): Note: Depending on the vendor, there may be more than one (1) Contract Line Item Numbers (CLINs) CLIN 0001 - One (1) cluster deposition system with double radial distribution chamber (RDC) configuration and one (1) X-Ray Photoelectron Spectroscopy (XPS) characterization system (vi) Description of requirements: The Contractor shall provide one (1) cluster deposition system with double radial distribution chamber (RDC) configuration and one (1) X-Ray Photoelectron Spectroscopy (XPS) characterization system that meets the following minimum requirements: Double Radial Distribution Chamber (RDC) minimum requirements: Radial Distribution Chamber for 4" Plates, shall include: Ellipsoidal transfer chamber Radial telescopic transfer arm with two motorized axes (extension and polar angle) with transfer fork for 4" sample plates Turbo-molecular pump (nominal pumping speed 685 liters per second(l/s)and an oil-free scroll backing pump (nominal pumping speed 6.2 m³/hr [cubic meters per hour]) with automatic shutoff valve nominal size/type DN 25 Quick Flange (KF) pumping lines and KF connectors Wide-range pressure gauge 1 atmosphere(atm)] to 1 x 10-8 millibar (mbar) with pressure readout and display via control system Bakeout cover - control system for safe and convenient handling of the system at all times, pumps and pressure gauges should be integrated, valves, and the radial transfer arm. - Semi-automated sample transfer, controlled via tablet/computer. Shall include a maximum 4 inch wafer compatibility loader and design for modular and configuration and addition of third party tools. Mechanical integration to atomic layer deposition(ALD) shall include the following characteristics: Size/type DN 160 conflat flange (CF) Transfer tube, where DN 160 CF refers to 8.00" outer diameter (OD) Type 304L stainless steel (SS) Standard ConFlat® (CF) Flanges. Flexible bellows with springs for adjustment, Pneumatic gate valve type/size DN 160 CF with position indicator to prevent collisions between gate valve and transfer arm. Sample plates for load/transfer. Provide flag style wafer holder options. Meet a pass line height for the transfer module (height of integration) 1200 millimeters(mm) Radial Distribution Chamber (RDC) telescopic reach to achieve a 1074 mm radius from center. Shall include a Wafer flipper Shall include a Wafer storage carousel for up to four 4" wafers mounted on a rotary feedthrough and a linear shift with position encoder – Quick access door DN 160 CF with integrated viewport – Load lock chamber for 4" sample holders for connection to a Radial Distribution Chamber: - UHV chamber made of stainless steel with ports for a quick access door, The load lock chamber is electrically integrated to the control system of the host module (e.g. Radial Distribution Chamber) pressure measurement, an optional lamp heater, a DN 160 CF port for connection to an adjacent ultra-high vacuum(UHV) chamber, e.g. a Radial Distribution Chamber Shall include a Turbo-molecular pump (nominal pumping speed 270 l/s) Shall include an Oil-free scroll backing pump (nominal pumping speed 6.3 m³/hr.) with automatic shutoff valve DN 25 KF, pumping lines and KF connectors Shall include a Wide-range pressure gauge (atm...1 x 10-8 mbar) with pressure readout and display via an existing control system Shall include a Wafer heater and storage loadlock off of one RDC: A wafer holder with storage and processing capabilities for high temperature annealing designed on the RDC components on the HV side (close to the ALD). The heating capabilities up to 650 (degrees Celsius) and adequate heating rates as needed. Shall include a Set of 4" Sample Plates Consisting of: Transfer tube, Flexible bellows with springs for adjustment, Pneumatic gate valve with position indicator to prevent collisions between gate valve and transfer arm. XPS Lab Module minimum requirements: Shall include a Spherical analysis chamber made of mu-metal with the following characteristics. Prepared for electron energy analyzers and X-ray sources in magic angle geometry. Optimized ports for additional options like Auger Electron Spectroscopy (AES), Vacuum Ultraviolet (VUV), depth profiling, gas cluster ion beam sputtering, and charge neutralization. Equipped with additional ports for upgrade options, blank flanges, and viewports covered with lead glass. UHV system, designed for X-ray Photoelectron Spectroscopy (XPS) with X-ray, VUV photoelectron spectroscopy, and Auger electron spectroscopy. Turbomolecular Pump 300 and titanium sublimation pump (TSP) - Standard pump configuration for analysis chamber - 260 l/s turbomolecular pump backed by 6 m³/hr. scroll pump and TSP. Ion getter pump (option availability) Electromagnetic KF shutoff valve to isolate the roughing pump from the vacuum chamber and turbo pump, e.g., in case of a power failure. Pressure measurement by UHV ion gauge (BA type). Base pressure for analysis chamber better than 5 x 10-10 mbar. Base pressure for analysis chamber with optional ion-getter-pump better than 3 x 10-10 mbar Shall include an Excitation sources with Small spot size of <150 micrometers (?m) diameter (at 50 mm working distance), Raster area of 10 mm x 10 mm (at 50 mm working distance) with the following characteristics: Monochromated Al-Ka X-ray with an excitation line width is < 250 meV. High power X-ray mode for continuous operation at 300 Watts. The system shall include a closed-circuit water cooling system for the anode. VUV, Focused ion sources. Shall include a Detector (high dynamic range from single electron detection up to >100 MHz with linear response) with the following characteristics: Minimum of 128 detection channels. Count rate Resolution 0.6-1.2 eV FWHM (Full width at half maximum) for 0.75-3.0 Megacountsper second (Mcps)) Snapshot mode capability continuous operation millisecond (ms) dwell time Window: 14.5% of pass energy Real time feedback Scanned acquisition mode capability. Shall include a Hemispherical energy analyzers optimized to fast analysis, high sensitivity and energy resolution for XPS and UPS applications with the following characteristics: Excitation sources in magic angle geometry (54.7°), Straightforward data analysis. Analyzer hemisphere mean radius greater than 120 mm and double mumetal shielding. Low-noise, high-resolution kinetic energy measurement up to 2000 electron Volts(eV) Three magnification modes Six in-situ selectable apertures. Operating modes: Constant Analyzer Energy (CAE) Constant Retarding Ratio (CRR). Chemical state mapping and identifying points of interest. Deflection range greater than (10 mm x 10 mm) Mapping of large and multiple regions of the sample. Mean radius: 124 mm Kinetic Energy: up to 2000 eV Working distance (end of analyzer to sample): 30 mm Pass energy range: 5 eV to 200 eV (continuous) Magnification modes: 3 Shall include a Scanning fine focus Ar+ ion source Depth Profiling Option Package with the following characteristics: high-performance sputter etching, sensor cleaning, depth profiling, and charge neutralization. integrated into the software. bundled to enable automatic measurement sequences. Shall include an Electron flood source for charge neutralization with the following characteristics: Energy range 0.01 to 500 eV. Sample current up to 100 ?A. Thoriated tungsten cathode. Shall include Calibration standards block with the following characteristics: Faraday cup and reference samples: silver (Ag), gold (Au), copper (Cu). Knife edge for spectral and spatial resolution. Shall include a Sample stage for up to 4” wafer samples. Remote stage controller for software-controlled sample manipulation and positioning with the following characteristics. 5-axis UHV manipulator. X/Y-travel: ±25 mm circle vector. Z- travel: 200 mm (up to technical clarification). Polar rotation: ±90° (subject to geometrical limitations, 60° with 4 inch sample plate in one direction). Azimuthal rotation: ±180°. Motorized actuation for all 5 axes. Visual Sample Navigation provided by a high resolution CCD camera and interaction with the stage controller. Scientific sample stage (option availability) Temperature 160K to 1100K. Electrically isolation for ground/bias capability. Shall include an Acquisition software system with the following characteristics: modern high performance Win10 PC comes with all necessary hard- and software preinstalled, configured and pre-tested for operation including the acquisition software, data management tools and the commercial data analysis software including elemental libraries. User-friendly control and acquisition software with simple and preconfigured standard experiments as well as the possibility to create experimental workflows adapted to specific scientific needs. Automated experiment sequences such as depth profiling and multi-sample analysis can be performed. Shall include a Manipulator (5-axis motorized motion control). Shall include Full compatibility with all types of flag style sample holders in cluster and up to 4” standard wafer. Shall include a Central control system and software to provide the following characteristics: Intuitive, user friendly operation Full visualization of all vacuum system components. Reliable industry-standard technology Complete fast-status overview and control of valves, pumps, pressure gauges and bakeout equipment. Preconfigured bakeout procedure, easily be adapted by the user. Shall include Interlocks to ensure a safe operation of the vacuum system. Shall include a Separate rack for the component electronics with small floor level footprint and casters with leveling feet, for easy alignment in the lab. Shall include an XPS system that comes completely assembled, fully tested as a turn-key system to enable fast and reliable implementation at the laboratory. (vii) Delivery is required no later than Twenty eight weeks (28) Weeks After Receipt of Order (ARO). Delivery shall be made to Adelphi, MD 20783. Acceptance shall be performed at Adelphi, MD 20783. The FOB point is Destination/Adelphi. (viii) The provision at 52.212-1, Instructions to Offerors – Commercial, applies to this acquisition. The following addenda have been attached to this provision: None. (ix) The provision at FAR 52.212-2, Evaluation - Commercial Items is applicable to this acquisition. The specific evaluation criteria to be included in paragraph (a) of that provision are as follows: In accordance with FAR 13.106-2(b)(3), comparative evaluation procedures will be utilized. Comparative evaluation is the comparison of all offers received in response to this solicitation against each other. An item-by-item comparison of each offer to one another will be performed to determine which offer provides the most benefit to the Government. Award will be made to the offer that is most advantageous to the Government. The Government may award to the lowest priced offeror that meets the Government’s minimum requirements; however, the Government reserves the right to award to a higher priced offeror exceeding the minimum requirements if it is most advantageous to the Government. In order to be considered for award, an offer must meet the Government’s minimum technical requirement contained in this solicitation. The below evaluation factors will be utilized during evaluation (in no order of relative importance): Price Technical Capabilities/Specification Past Performance (x) Offerors shall include a completed copy of the provision at FAR 52.212-3 (with its Alternate I), Offeror Representations with its offer. (xi) The clause at 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause: NONE. (xii) The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items and the selected clauses listed in DFARS 212.301 Solicitation provisions and Contract Clauses for the Acquisition of Commercial Items, applies to this acquisition. FAR: 52.203-3 GRATUITIES (APR 1984) 52.203-6 ALT I RESTRICTIONS ON SUBCONTRACTOR SALES TO THE GOVERNMENT (SEP 2006) 52.204-10 REPORTING EXECUTIVE COMPENSATION AND FIRST-TIER SUBCONTRACT AWARDS (OCT 2018) 52.209-6 PROTECTING THE GOVERNMENT’ INTEREST WHEN SUBCONTRACTING WITH CONTRACTORS DEBARRED, SUSPENDED, OR PROPOSED FOR DEBARMENT (OCT 2015) 52.209-9 UPDATES OF PUBLICLY AVAILABLE INFORMATION REGARDING RESPONSIBILITY MATTERS (OCT 2018) 52.209-10 PROHIBITION ON CONTRACTING WITH INVERTED DOMESTIC CORPORATIONS 52.219-8 UTILIZATION OF SMALL BUSINESS CONCERNS (OCT 2018) 52.219-9 SMALL BUSINESS SUBCONTRACTING PLAN (MAR 2020) 52.219-14 LIMITATIONS ON SUBCONTRACTING (DEVIATION 2020-00008) 52.219-16 LIQUIDATED DAMAGES-SUBCONTRACTING PLAN (JAN 1999) 52.219-28 POST-AWARD SMALL BUSINESS PROGRAM REREPRESENTATION (MAY 2020) 52.222-3 CONVICT LABOR (JUN 2003) 52.222-19 CHILD LABOR--COOPERATION WITH AUTHORITIES AND REMEDIES (JAN 2020) (DEVIATION 2020-O0019) 52.222-21 PROHIBITION OF SEGREGATED FACILITIES (APR 2015) 52.222-26 EQUAL OPPORTUNITY (SEP 2016) 52.222-35 EQUAL OPPORTUNITY FOR VETERANS (OCT 2015) 52.222-36 AFFIRMATIVE ACTION FOR WORKERS WITH DISABILITIES (JUL 2014) 52.222-37 EMPLOYMENT REPORTS ON SPECIAL DISABLED VETERANS, VETERANS OF THE VIETNAM ERA, AND OTHER ELIGIBLE VETERANS (FEB 2016) 52.222-40 NOTIFICATION OF EMPLOYEE RIGHTS UNDER THE NATIONAL LABOR RELATIONS ACT (DEC 2010) 52.222-50 COMBATING TRAFFICKING IN PERSONS (OCT 2020) 52.222-54 EMPLOYMENT ELIGIBILITY VERIFICATION (OCT 2015) 52.223-18 ENCOURAGING CONTRACTOR POLICIES TO BAN TEXT MESSAGING WHILE DRIVING (AUG 2011) 52.225-13 RESTRICTIONS ON CERTAIN FOREIGN PURCHASES (JUN 2008) 52.232-33 PAYMENT BY ELECTRONIC FUNDS TRANSFER—CENTRAL CONTRACTOR REGISTRATION (OCT 2018) 52.232-36 PAYMENT BY THIRD PARTY (MAY 2014) 52.242-5 PAYMENTS TO SMALL BUSINESS SUBCONTRACTORS (JAN 2017) DFARS: *252.203-7005 REPRESENTATION RELATING TO COMPENSATION OF FORMER DOD OFFICIALS (NOV 2011) 252.204-7003 CONTROL OF GOVERNMENT PERSONNEL WORK PRODUCT 252.204-7004 DOD ANTITERRORISM AWARENESS TRAINING FOR CONTRACTORS (FEB 2019) *252.204-7008 COMPLIANCE WITH SAFEGUARDING COVERED DEFENSE INFORMATION CONTROLS (OCT 2016) 252.204-7015 DISCLOSURE OF INFORMATION TO LITIGATION SUPPORT CONTRACTORS (MAY 2016) *252.204-7016 COVERED DEFENSE TELECOMMUNICATIONS EQUIPMENT OR SERVICES—REPRESENTATION (DEC 2019) *252.204-7017 PROHIBITION ON THE ACQUISITON OF COVERED DEFENSE TELECOMMUNICATIONS EQUIPMENT OR SERVICES—REPRESENTATION (DEC 2019) 252.204-7018 PROHIBITION ON THE ACQUISITION OF COVERED DEFENSE TELECOMMUNICATIONS EQUIPMENT OR SERVICES (DEC 2019) *252.213-7000 NOTICE TO PROSPECTIVE SUPPLIERS ON USE OF PAST PEFORMANCE INFORMATION RETRIEVAL SYSTEM—STATISTICAL REPORTING IN PAST PERFORMANCE *252.215-7008 ONLY ONE OFFER (JUL 2019) 252.219-7003 SMALL BUSINESS SUBCONTRACTING PLAN (DOD CONTRACTS) 252.223-7008 PROHIBITION OF HEXAVALENT CHROMIUM (JUN 2013) *252.225-7020 TRADE AGREEMENTS CERTIFICATE (NOV 2014) 252.225-7021 TRADE AGREEMENTS (AUG 2019) (DEVIATION 2020-O0019) 252.225-7012 PREFERENCE FOR CERTAIN DOMESTIC COMMODITIES (DEC 2017) 252.225-7048 EXPORT-CONTROLLED ITEMS (JUN 2013) *252.225-7974 **USE DEVIATION 2020-O0005 UNTIL FURTHER NOTICE REPRESENTATION REGARDING BUSINESS OPERATIONS WITH THE MADURO REGIME (DEVIATION 2020-O0005) (FEB 2020) 252.226-7001 UTILIZATION OF INDIAN ORGANIZATIONS, AND INDIAN-OWNED ECONOMIC ENTERPRISES, AND NATIVE HAWAIIAN SMALL BUSINESS CONCERNS (APR 2019) 252.232-7010 LEVIES ON CONTRACT PAYMENTS (DEC 2006) 252.243-7002 REQUESTS FOR EQUITABLE ADJUSTMENT (DEC 2012) 252.244-7000 SUBCONTRACTS FOR COMMERCIAL ITEMS (JUN 2013) 252.246-7008 SOURCES OF ELECTRONIC PARTS 252.247-7023 TRANSPORTATION OF SUPPLIES BY SEA (FEB 2019) (xiii) The following additional contract requirement(s) or terms and conditions apply (full text of all FAR/DFARS clauses that contain fill-in information, as well as all local clauses, can be found in the attached Provisions and Clauses Full-Text document): FAR/DFARS Clauses: *52.204-7 SYSTEM FOR AWARD MANAGEMENT (OCT 2018) 52.204-13 SYSTEM FOR AWARD MANAGEMENT MAINTENANCE (OCT 2018) *52.204-16 COMMERCIAL AND GOVERNMENT ENTITY CODE REPORTING (AUG 2020) 52.204-18 COMMERCIAL AND GOVERNMENT ENTITY CODE MAINTENANCE (AUG 2020) 52.209-7 INFORMATION REGARDING RESPONSIBILITY MATTERS (JUL 2013) 52.232-40 PROVIDING ACCELERATED PAYMENTS TO SMALL BUSINESS SUBCONTRACTORS (DEC 2013) 252.203-7000 REQUIREMENTS RELATING TO COMPENSATION OF FORMER DOD OFFICIALS (SEP 2011) 252.204-7000 DISCLOSURE OF INFORMATION (OCT 2016) 252.204-7012 SAFEGUARDING COVERED DEFENSE INFORMATION AND CYBER INCIDENT REPORTING (OCT 2016) 252.232-7003 ELECTRONIC SUBMISSION OF PAYMENT REQUESTS AND RECEIVING REPORTS (JUN 2012) FAR/DFARS Clauses By Full-Text: *52.204-24 REPRESENTATION REGARDING CERTAIN TELECOMMUNICATIONS AND VIDEO SURVEILLANCE SERVICES OR EQUIPMENT (OCT 2020) *52.204-26 Covered Telecommunications Equipment or Services--Representation (OCT 2020) *52.252-1 PROVISIONS INCORPORATED BY REFERENCE (FEB 1998) 52.252-2 CLAUSES INCORPORATED BY REFERENCE (FEB 1998) 52.252-6 AUTHORIZED DEVIATIONS IN CLAUSES 252.211-7003 ITEM IDENTIFICATION AND VALUATION (MAR 2016) 252.232-7006 WIDE AREA WORKFLOW PAYMENT INSTRUCTIONS (DEC 2018) LOCAL CLAUSES: ACC - APG POINT OF CONTACT TECHNICAL POINT OF CONTACT TYPE OF CONTRACT AT-OPSEC REQUIREMENTS DISTRIBUTION STATEMENT B GOV INSPECTION AND ACCEPTANCE PAYMENT OFFICE (BANKCARD) TAX EXEMPTION CERT. (ARL) PAYMENT INSTRUCTIONS RECEIVING ROOM – ARL *EXCEPTIONS IN PROPOSAL *AWARD OF CONTRACT *ADELPHI CONTR. DIVISION URL *FOREIGN NATIONAL PERFORMING *SUBCONTRACTING PLAN *PAYMENT TERMS (xiv) This acquisition is rated under the Defense Priorities and Allocations System (DPAS) as: N/A (xv) The following notes apply to this announcement: In accordance with FAR 32.003, contract financing cannot not be provided for this acquisition. (xvi) Offers are due thirty (30) days after posting, by 11:59 AM, at crystal.l.demby.civ@mail.mil. (xvii) For information regarding this solicitation, please contact Crystal Demby, 301-394-1503, crystal.l.demby.civ@mail.mil.
Data sourced from SAM.gov.
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