The Naval Research Laboratory in Washington, DC, seeks to purchase a Nanoscience Process Gas Line Installation for a specific plasma etch system. The procurement is a Total Small Business Set-Aside for new, brand-name or equal equipment, requiring vendors to be authorized OEM distributors. Performance and delivery are to the Naval Research Laboratory at 4555 Overlook Avenue, S.W. in Washington, DC. The evaluation will be based on the Lowest Price Technically Acceptable method.