Metal Etch Inductively Coupled Plasma Reactive Ion Etching (ICP - RIE) Tool Inactive Notice ID:N00173-20-Q-TS02 Department/Ind.Agency Subtier Office DEPT OF DEFENSE DEPT OF THE NAVY NAVAL RESEARCH LABORATORY NAICS 333242 - Semiconductor Machinery Manufacturing PSC SPECIALIZED SEMICONDUCTOR, MICROCIRCUIT, AND PRINTED CIRCUIT BOARD MANUFACTURING MACHINERY Data sourced from SAM.gov. View Official Posting »