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The ARMS foundry requires an etching tool with advanced silicon carbide (SiC) etch capability. Since the ARMS foundry is adding SiC device fabrication to its capabilities, this etching tool will addre... The ARMS foundry requires an etching tool with advanced silicon carbide (SiC) etch capability. Since the ARMS foundry is adding SiC device fabrication to its capabilities, this etching tool will address the gap for successful execution of SiC manufacturing.