Inactive Total Small Business Set-Aside (FAR 19.5)

Procurement of 3D-Micromac microPRO XS Laser Anneal System for laser anneal capability to form backside ohmic contact with nickel silicide for SiC device manufacturing and future high voltage device m... Procurement of 3D-Micromac microPRO XS Laser Anneal System for laser anneal capability to form backside ohmic contact with nickel silicide for SiC device manufacturing and future high voltage device manufacturing.