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The goal of the TUFEN Microsystems Exploration Topic is to determine and demonstrate the range of physical conditions for ferroelectric behavior in doped nitride materials and to characterize the effe... The goal of the TUFEN Microsystems Exploration Topic is to determine and demonstrate the range of physical conditions for ferroelectric behavior in doped nitride materials and to characterize the effects of physical dimensions, material composition, and processing conditions. Furthermore, this effort will demonstrate device functionality and reliability characterization in concert with the ferroelectric properties of these nitride materials.