The National Institute of Standards and Technology (NIST) requires a suite of high-specification nanopositioners and hexapods for non-destructive measurement of nanoscopic devices using extreme ultraviolet light, with all equipment needing to operate under high vacuum. The positioners must include optical encoders with at least 1 nm or 3 micro-degree resolution and repeatability better than 50 nm, with one hexapod and one 4-axis assembly made of non-magnetic materials for use in magnetic fields up to 1 Tesla. NIST conducted market research from June 2025 to January 2026 and determined that only SmarAct Inc can meet all minimum requirements, leading to a notice of intent to sole source. The location for performance is at NIST, and no budget amount is specified. Respondents must provide company details, equipment specifications, and capability information by the closing date to be considered.