The National Institute of Standards and Technology (NIST) seeks to upgrade the control system for its existing SUSS ACS200 Gen3 Microlithography cluster at the Gaithersburg, MD cleanroom, as the current computer is broken and obsolete. The upgrade must include a new Tool Controller Panel and PC with a proper operating system, using all new materials, and be performed by OEM-trained personnel qualified on SUSS MicroTec equipment. The new system must handle substrates up to 150 mm diameter, support all existing sequences and recipes, and include data transfer, training, and updated manuals. NIST’s market research from April to November 2025 identified Suss Microtec as the only source capable of meeting all minimum requirements. This is a combined sources sought notice and notice of intent to sole source, not a solicitation, and responses are requested to inform market research.