Rapid Thermal Annealing System
This is a market research notice to identify potential sources for a new Rapid Thermal Annealing (RTA) system for NIST's Boulder Microfabrication Facility. The required system must process substrates up to 150 mm, meet specific technical specifications including temperature and gas delivery capabilities, and fit within a defined floor space. The performance location is the Boulder Microfabrication Facility in Boulder, Colorado. Only new, commercial systems will be considered; prototypes, used, or refurbished instruments are not acceptable. Respondents must provide detailed company and product information, including technical specifications, country of manufacture, and available support services.