Hydrofluoric Acid Vapor Etcher
NIST-SS26-102
This is a market research notice to identify commercial sources for a new hydrofluoric acid vapor etcher for NIST's Boulder Microfabrication Facility. The required tabletop unit must process samples up to 150 mm, meet strict safety and cleanroom standards, and use HF liquid. The notice seeks detailed product and company information from potential suppliers, including technical specifications, manufacturing origin, and available support services. Responses are requested as soon as possible and must be submitted via email to the listed points of contact.