Inactive

NIST Nanocalorimetry for Semiconductors and Semiconductor Process Metrology project requires a plasma diagnostic suite (PDS) which will be used as a benchmark for testing the NIST Nanocalorimetry plat... NIST Nanocalorimetry for Semiconductors and Semiconductor Process Metrology project requires a plasma diagnostic suite (PDS) which will be used as a benchmark for testing the NIST Nanocalorimetry platform for plasma semiconductor process metrology under the CHIPS act. The plasma diagnostic suit will include a Langmuir probe for general bulk plasma characterization, Retarding field ion energy analyzer, Quartz microbalance sensor for plasma deposition monitoring (if any) and reactive radicals flux monitoring. The PDS will be used inside the same test plasma reactor chamber where Nanocalorimetry plasma sensors (NPS) will be tested to evaluate the performance of NPS against the state-of-the-art PDS. NIST is seeking information from sources that may be capable of providing a commercial item solution that meets or exceeds the following draft minimum specifications: 1. Langmuir probe for bulk plasma diagnostics in three custom built chambers 1.1. Total probe length: 500 mm -550 mm. 1.2. Movable design for spatial diagnostics, such that the probe sensor position can be moved in and out at least 250 mm. 1.3. Sensitivity: 15nA - 150mA 1.4. Replaceable tips and in-situ tips self-cleaning capability 1.5. RF signal filters for: 13.56 MHz, 94 MHz, 40 kHz excitations 1.6. Capability of collect time-averaged, time-resolved and triggered electrical measurements with frequencies > 100 Hz 1.7. High Vacuum compatibility and operational temperature up to T=100 C 2. Sensors for substrate level plasma diagnostics 2.1. Retarding Field Energy Analyzer for ion velocity and energy distribution in RF plasma (frequency range 100 kHz up to 80 MHz); with ion flux sensitivity better than 10-4 A/cm2 up to 10-7 A/cm2; with max RF bias +/-800 V and max DC bias 1000 V. 2.2. Integrated quartz crystal microbalance sensor covered with sp2 carbon film for etching rate measurements by reactive radicals. 2.3. Temperature compensating setup for addressing the thermal drift of the quartz microbalance sensor. 2.4. Maximum sensor dimensions 100 mm in diameter (or width /length) and 10 mm thickness. Cable length to the on-flange controller min 360 mm max 720 mm. HOW TO RESPOND TO THIS NOTICE In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORRMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact specialist listed at the bottom of this notice as soon as possible, and preferably before the closing date and time of this notice. Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI). Identify laboratory equipment that your company sells that is of the nature addressed in the BACKGROUND section of this notice. Include brand name, make, model, and/or other distinguishing information. State if your company is the manufacturer of the identified equipment or is a retailer or wholesaler that normally sells the identified equipment. If the latter, indicate whether the manufacturer authorized in writing for your company to sell the identified equipment on behalf of the manufacturer. Describe performance capabilities and relevant or beneficial physical and functional features for any equipment you identified to satisfy the NIST-identified minimum specifications described in this notice. Identify any aspects of the NIST market research notice, including instructions, and draft minimum specifications in the BACKGROUND section above that could be viewed as unduly restrictive or contain unnecessary barriers that adversely affect your ability to fully participate and indicate why. In such a scenario, please offer suggestions for how the market research notice and draft minimum specifications could be made more inclusive and competitive. Discuss whether the equipment that your company sells and which you describe in your response to this notice may be customized to specifications and indicate any limits to customization. For the NAICS code listed in this notice: Indicate whether your company is (a) a small business or (b) other than small business. See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information. If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement. Describe services that are available with the purchase of the aforementioned equipment from your company such as installation, training, and equipment maintenance. Describe standard terms and conditions of sale offered by your company for the aforementioned equipment such as: delivery time after your company accepts the order; FOB shipping terms: manufacturer warranty (including details regarding nature and duration); if available, description(s) of available extended warranty; equipment setup and test; operator and service instruction manual(s); cleanup after installation; and if applicable, other offered services. Provide a copy of manufacturer standard terms and conditions that typically relate to the sale of the specified equipment, if available. State whether your company offers facility renovation services related to installation of the aforementioned equipment at its delivery destination, if required per the NIST-identified minimum specifications, and provide description of services. Indicate if your company performs the facility renovation services or typically subcontracts the work to another company. Indicate if your company would be interested inspecting the intended installation site during the market research phase. State published price, discount or rebate arrangements for aforementioned equipment and/or provide link to access company’s published prices for equipment and services. State whether the aforementioned equipment is manufactured in the United States and, if not, state the name of the country where the equipment is manufactured. Identify any plans/possibilities for changes in manufacturing location of the aforementioned equipment and provide relevant details. If the aforementioned equipment and related services are available for purchase on any existing Federal Supply Schedule contract(s) or other contracts against which NIST may be able place orders, identify the contract number(s) and other relevant information. Identify any customers in the public or private sectors in which you provided the aforementioned or similar equipment. Include customer(s) information: company name, phone number, point of contact, email address. Provide any other information that you believe would be valuable for NIST to know as part of its market research for this requirement. State if you require NIST to provide additional information to improve your understanding of the government’s requirement and/or would like to meet with NIST representatives to discuss the requirement and the capabilities of the identified equipment. QUESTIONS REGARDING THIS NOTICE Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received by 11:00 a.m. Eastern Time 5 days before the response date. Questions will be anonymized and answered via sources sought notice amendment following the question submission deadline. IMPORTANT NOTES The information received in response to this notice will be reviewed and considered so that NIST may appropriately solicit for its requirements in the near future. This notice should not be construed as a commitment by NIST to issue a solicitation or ultimately award a contract. Responses will not be considered as proposals or quotations. No award will be made as a result of this notice. NIST is not responsible for any costs incurred by the respondents to this notice. NIST reserves the right to use information provided by respondents for any purpose deemed necessary and appropriate. Thank you for taking the time to submit a response to this request!