This is a market research Sources Sought notice from NIST for the CHIPS Metrology Program, seeking vendors capable of providing specific silicon wafers with deposited nanometer-scale films and extensive associated metrology data. The requirement is for two classes: oxide/nitride films and epitaxial SiGe films, each requiring at least two material sets and either 10 (300mm) or 15 (200mm) wafers per set, with detailed technical specifications for deposition and characterization. NIST anticipates issuing a Request for Quotation in the second quarter of Fiscal Year 2026, with a contract award expected by the fourth quarter of FY 2026. The performance location is not specified, and no budget information is provided. Responses are voluntary capability statements used to inform a potential future acquisition.