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The National Institute of Standards and Technology (NIST) has been conducting Extreme Ultraviolet (EUV) metrology for over fifty years. The metrology services are provided for Industry, academia and G... The National Institute of Standards and Technology (NIST) has been conducting Extreme Ultraviolet (EUV) metrology for over fifty years. The metrology services are provided for Industry, academia and Government customers for a wide variety of applications. NIST’s EUV metrology effort relies on the Synchrotron Ultraviolet Radiation Facility (SURF III) as its primary EUV light source for both source-based and detector-based radiometric measurements. One of the beamlines (beamline 7) located on SURF III includes a grazing incidence monochromator and reflectometer facility for reflectance measurements in the EUV region. This sources sought is for a replacement reflectometer vacuum chamber and goniometer for beamline 7 to provide improved performance, reliability and efficiency. The beamline 7 monochromator is also to be replaced which is a subject of an additional sources sought request. (Notice ID: NIST-FY25-CHIPS-0067 on SAM.gov) NIST is seeking information from sources that may be capable of providing a solution that will achieve the objectives described above, in addition to the following essential requirements: Location: The Reflectometer shall be installed at the SURF III facility at NIST’s Gaithersburg campus. SURF III operates with the following conditions: Electron Energy: 380 MeV Electron beam Radius of Curvature: 0.83 m Frequency: 114 MHz (2 bunches @ 57 MHz) Beam current: 300 mA to 100 mA Beam size (H x W, FWHM): 2 mm x 3.56 mm – 3.2 mm, (depending on beam current) Beam height: 157.5 cm above floor The reflectometer must occupy available space: Reflectometer shall be located in the existing laboratory space with the goniometer’s motions centered at the beamline 7 monochromator’s output approximately 402 cm (TBD, based on monochromator’s design) along line of sight from the radiation wall. Height of exit slit: 114 cm from laboratory floor. (estimated, TBD based on monochromator’s design) Monochromator output: range – 6 nm to 35 nm, F/# (estimated) 50 (horizontal) x 167 (vertical) Sketch of laboratory space location included for clarity. (figure 1) Vacuum requirements: The reflectometer must be housed in an ultrahigh vacuum system: Final system is required to have a base pressure below 5 x 10-8 Torr and pass a residual gas analysis test with partial pressures no higher than 10-11 Torr at atomic mass units higher than 44. The system will incorporate copper gasketed-knife-edge seals (ConFlat® or equivalent) for flanges and use imperial fasteners. Flange/port quantity and position to be determined based on design. NIST will provide rough pumping via a dry scroll pump and roots system and high vacuum via quantity 2 cryogenic pumps (10” body, 3000 l/s) and appropriate gate valves for pumps. Chamber shall include multiple internal and external attachment point (quantity TBD) for attachment of instrumentation on the internal and external walls of the vacuum chamber. A large main door for the chamber will be required for sample insertion and removal and goniometer maintenance. The main door must allow for personnel entry into the chamber and accommodate sample insertion and removal. The main door must accommodate daily use of the door with an elastomer seal and tool-free sealing and opening. The chamber must accommodate personnel entry to accommodate sample placement and removal and goniometer maintenance. Vendor and NIST will collaborate to specify a NIST-provided sample preparation clean space and sample handling assist hardware. Motion Requirements: The reflectometer must include a motion system housed within the described Ultrahigh vacuum system. The sample motion system requirements: Maximum sample size 600 mm diameter, 250 mm thick, 50 kg mass Goniometer must allow horizontal sample loading Axes (relative to incident beam): X: Range ± 25 mm, 0.01 mm resolution, Options for range of ± 25 mm to ± 50 mm Y: Range -350 mm/+25 mm, 0.01 mm resolution Z: full travel 175 mm, 0.01 mm resolution, must allow for mounted 250 mm thick grazing sample to be lowered out of way of incoming EUV beam. Pitch (from normal): Range -5° to + 95°, 0.02° resolution Roll: 360° continuous, 0.02° resolution Yaw: Range ± 5°, 0.02° resolution, Options for range of ± 15° and ± 30° Figures 2-4 included for clarity. Goniometer will include sample platen that is minimum 650 mm in diameter with a hole pattern TBD with a surface 290 mm (or more) below incoming EUV beam. Detector motion requirements: Detector turret (provided by NIST) shall move in a 2-theta type motion around sample goniometer’s center of motion. (Tolerance TBD) Detector turret with 2 detectors and scintillator-based camera (provided by NIST), figure 5 included. 0 to 360 rotation. Detector Pitch: Range +185° to -5°, 0.02° resolution Detector Yaw: Range +/- 5°, 0.02° resolution Detector distance motion: Range 200 mm, 0.02 mm resolution. Varies radius of motion for detector pitch to be varied from 350 mm to 150 mm. Figure 6 included for clarity. All axes will include UHV compatible quadrature encoders, limit and home switches. All optical encoders will enclosed/shielded to eliminate leakage of radiation. All in vacuum cabling shall be UHV compliant and included. All required electrical feedthroughs shall be connector based (no flying lead or floating pin), ConFlat® (or equivalent) sealed. All atmospheric cabling required for the motion systems shall be provided by the vendor and connectorized with a minimum length of 5 m. The vendor shall provide the option to include the electronics (controllers, amplifiers, etc) required for goniometer and detector motions or NIST may provide electronics for the goniometer and detector motions if this option is not selected. Mechanical requirements: The Reflectometer chamber and goniometer must be installed in the available space in the SURF III experimental hall laboratory space: NIST shall provide available mechanical drawings of existing space and access to space for vendor measurements and evaluation. The vendor shall not make any modifications to existing space without permission from NIST. Vacuum system support structure shall be provided by vendor and utilize materials appropriate for long-term thermal and mechanical stability of the Reflectometer vacuum chamber and goniometer. All hardware must be installed by vendor and must fit through existing doorway openings (178 cm wide x 210 cm tall). The vacuum chamber and goniometer shall be installed with goniometer and detector motions centered on the beamline monochromator’s output spot location. (Tolerance TBD) NIST will arrange for removal of existing beamline prior to vendor delivery of vacuum chamber and goniometer. Documentation and reporting: Upon delivery of reflectometer chamber and goniometer vendor shall provide: Mechanical drawings (or 3D models) of all custom mechanical components included in delivered reflectometer chamber, goniometer and detector motion systems. Bill of materials of components included in delivered reflectometer chamber, goniometer and detector motion systems. Documentation detailing operation of reflectometer chamber and associated motions including details of mechanical systems as required for operation of the reflectometer chamber, goniometer and detector motion systems. Vendor shall provide monthly reports during design and manufacturing stages to keep NIST informed of status of the manufacture and delivery schedule. Please include estimate of lead time with any response to this sources sought notice. HOW TO RESPOND TO THIS NOTICE In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possible, and preferably before the closing date and time of this notice. Please note that to be considered for award under any official solicitation, the entity must be registered and “active” in SAM at the time of solicitation response. Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI). Identify the equipment that your company sells that can meet the objectives addressed in the BACKGROUND section of this notice. For each product recommended to meet the Government’s requirement, provide the following: Manufacturer name Model number Technical specifications If your company is not the manufacturer, provide information on your company’s status as an authorized reseller of the product(s) Describe performance capabilities of the product(s) your company recommends to meet the Government’s requirements. Additionally, if there are other features or functions that you believe would assist NIST in meeting its objectives described above, please discuss in your response. Discuss whether the equipment that your company sells and which you describe in your response to this notice may be customized to specifications and indicate any limits to customization. Identify any aspects of the NIST market research notice, including instructions, and draft minimum specifications in the BACKGROUND section you cannot meet and state why. Please offer suggestions for how the market research notice and draft minimum specifications could be made more competitive. State whether the proposed equipment is manufactured in the United States and, if not, state the name of the country where the equipment is manufactured. Identify any plans/possibilities for changes in manufacturing location of the aforementioned equipment and provide relevant details, including timeline. For the NAICS code listed in this notice: Indicate whether your company is (a) a small business or (b) other than small business. See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information. If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement. Describe services that are available with the purchase of the aforementioned equipment from your company such as installation, training, and equipment maintenance. Describe standard terms and conditions of sale offered by your company for the recommended equipment such as: delivery time after your company accepts the order; FOB shipping terms; manufacturer warranty (including details regarding nature and duration); if available, description(s) of available extended warranty; equipment setup and test; operator and service instruction manual(s); cleanup after installation; and if applicable, other offered services. Provide a copy of manufacturer standard terms and conditions that typically relate to the sale of the specified equipment, if available. State whether your company offers facility renovation services related to installation of the recommended equipment at its delivery destination, if required per the NIST-identified minimum specifications, and provide description of said services. Indicate if your company performs the facility renovation services or typically subcontracts the work to another company. Indicate if your company would be interested in inspecting the intended installation site during the market research phase. State published price, discount, or rebate arrangements for recommended equipment and/or provide link to access company’s published prices for equipment and services. If the recommended equipment and related services are available for purchase on any existing Federal Supply Schedule contract(s) or other contracts against which NIST may be able to place orders, identify the contract number(s) and other relevant information. Identify any customers in the public or private sectors to which you provided the recommended or similar equipment. Include customer(s) information: company name, phone number, point of contact, email address. Provide any other information that you believe would be valuable for NIST to know as part of its market research for this requirement. State if you require NIST to provide additional information to improve your understanding of the government’s requirement and/or would like to meet with NIST representatives to discuss the requirement and the capabilities of the identified equipment. QUESTIONS REGARDING THIS NOTICE Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received 5 days prior to the response date. If the Contracting Officer determines that providing a written amendment to this notice to document question(s) received would benefit other potential respondents, the questions would be anonymized, and a written response to such question(s) would be provided via an amendment to this notice. IMPORTANT NOTES Responses must be sent to both the Contract Specialist and Contracting Officer listed in the notice. Responses that do not include the Contracting Officer will not be considered. This notice is for market research purposes and should not be construed as a commitment by NIST to issue a solicitation or ultimately award a contract. There is no solicitation available at this time. This notice does not obligate the Government to award a contract or otherwise pay for the information provided in response. NIST reserves the right to use information provided by respondents for any purpose deemed necessary and legally appropriate. Any organization responding to this notice should ensure that its response is complete and sufficiently detailed to allow the Government to determine the organization’s capability. Respondents are advised that the Government is under no obligation to acknowledge receipt of the information received or provide feedback to respondents with respect to any information submitted. After a review of the responses received, a synopsis and solicitation may be published on GSA’s eBuy or SAM.gov. However, responses to this notice will not be considered an adequate response to any such solicitation(s). The responses shall not exceed 10 pages including all attachments, charts, etc. Thank you for taking the time to submit a response to this request!