HBr-Cl-based ICP Silicon Etch System and DRIE-based ICP Silicon Etch System

Inactive
Notice ID:NB680000-23-00677

Justification attached per FAR 6.305

Department/Ind.Agency Subtier Office
COMMERCE, DEPARTMENT OF NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY DEPT OF COMMERCE NIST
NAICS 333242 - Semiconductor Machinery Manufacturing
  PSC   METAL HEAT TREATING AND NON-THERMAL TREATING EQUIPMENT
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Notification