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NB305000-24-02724 6695 / 334516 Title:? Electron Multiplication Charge Coupled Device (EMCCD) Camera BACKGROUND The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do... NB305000-24-02724 6695 / 334516 Title:? Electron Multiplication Charge Coupled Device (EMCCD) Camera BACKGROUND The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing. The CHIPS Nanocalorimetry for Improved Semiconductor Fabrication In-Process Metrology project has been undertaken to develop and apply nanocalorimetry-based metrology to improve production methods in chip manufacturing. One focus of this project is atomic layer deposition (ALD). ALD for semiconductor processes involves pulsed delivery of gases, with some gas streams being a mixture of gas phase species. Since nanocalorimetry measurements are sensitive to the gas composition, temporally resolving the constituents of a gas mixture is a requirement for interpreting nanocalorimetry measurements during ALD. To address this need, we will perform in situ, time-resolved absorption measurements and Raman scattering measurements. These measurements require an electron multiplication charge coupled device (EMCCD) camera to be coupled to already existing Acton spectrographs. The camera needs to operate in the 200 nm to 900 nm spectral range with high time resolution (>1,000 fps, full vertical bin). High-precision (1 microsecond) hardware time stamping is needed to synchronize EMCCD data with other instrumentation. A single software interface for the camera and the spectrographs is required to fully control and automate spectral data acquisition with the output data files containing complete experimental metadata for traceability and reproducibility. The laboratory supporting this project is currently equipped with Acton 2300i, Acton 2500i, and Acton 2500SP spectrographs controlled using the proprietary LightField software (Teledyne Princeton Instruments). The EMCCD camera in this procurement needs to be readily and fully compatible (in both software and hardware) with the existing spectrographs and the software platform. The single software interface allows for greater efficiency in conducting spectroscopy experiments by automating wavelength calibration, experiment recall, and spectral stitching. NIST has a need for an EMCCD camera system compatible with existing Acton spectrographs capable of operating in the 200 nm to 900 nm spectral range for the MML/646 lab that meet or exceed the following draft minimum specifications: Line Item 0001: Camera Description: The camera incorporates a charge coupled device (CCD) sensor chip and electronics used to control the camera and to digitize the sensor signal Quantity: One (1) Technical Specifications, Camera Sensor type: Back-illuminated, electron-multiplying CCD Sensor coating: UV enhancement coating Chip size: greater than or equal to 25.6 mm by greater than or equal to 3.2 mm Pixel Format: greater than or equal to 1600 pixels by greater than or equal to 200 pixels Pixel Dimensions: less than or equal to 16 microns by less than or equal to 16 microns (square) Quantum Efficiency at 200 nm (at 300 K): greater than or equal to 35 % Quantum Efficiency at 300 nm (at 300 K): greater than or equal to 35 % Quantum Efficiency at 400 nm (at 300 K): greater than or equal to 70 % Quantum Efficiency at 500 nm (at 300 K): greater than or equal to 80 % Quantum Efficiency at 600 nm (at 300 K): greater than or equal to 80 % Quantum Efficiency at 700 nm (at 300 K): greater than or equal to 80 % Quantum Efficiency at 800 nm (at 300 K): greater than or equal to 70 % Quantum Efficiency at 900 nm (at 300 K): greater than or equal to 35 % CCD or electron multiplication CCD mode of operation: selectable Digitization: greater than or equal to 16 bits Electron multiplication gain: 1 to greater than or equal to 1000x Spectra readout rate, full vertical bin: greater than or equal to 1000 frames per second (1 millisecond time resolution) Dark current at -60 degrees C: less than or equal to 0.01 electrons/pixel/second Sensor readout noise at 100 kHz: less than or equal to 4 electrons Sensor readout noise at 1 MHz: less than or equal to 7 electrons Thermo-electric cooling with minimum sensor temperature of less than or equal to -60 degrees C (in 20 degrees C air) Optional liquid cooling for the thermo-electric cooler with minimum sensor temperature of less than or equal to -75 degrees C Hardware time stamping on each frame with a precision of 1 microsecond or better Linearity: less than or equal to 1 % deviation from a straight line fit of a plot of counts vs. signal at 1 MHz over the 16 bit dynamic range Window type: Single magnesium fluoride wedged window Window seal: Permanent vacuum with all metal seals and window brazed to vacuum chamber (no epoxies to be used) with a warranty on the vacuum seal of greater than or equal to five (5) years Mounting flange must be configured so as to permit the camera head to be mounted onto an Acton 2300i imaging spectrograph, an Acton 2500i imaging spectrograph, or an Acton 2500SP imaging spectrograph such that the camera focal plane and spectrograph focal plane can be made to overlap Data transfer interface: High-speed interface such as USB 3.0 or Gigabit ethernet Line Item 0002: Software Requirements Description: The vendor-supplied software is loaded onto a NIST-supplied computer and used to control the camera and a NIST-supplied spectrograph on which the camera head is mounted. Quantity: One (1) Technical Specifications Out-of-the-box spectroscopic and imaging data acquisition and analysis software compatible with 64-bit Windows 10 Software selectable CCD or EMCCD mode of operation Software selectable amplifier gain/sensitivity Software selectable sensor readout rates Software selectable sensor temperature Software selectable internal and external triggering capabilities Software selectable electron multiplication gain from 1 to 1000x Software can control the camera, an Acton 2300i imaging spectrograph, an Acton 2500i imaging spectrograph, and an Acton 2500SP imaging spectrograph in a fully-integrated package (plug-and-play) Software can automate repetitive data acquisition to collect an arbitrary number of frames, an arbitrary number of times, each acquisition batch initiated by an external trigger Software can perform automated naming and timestamping of repetitive data acquisition sequences Software can save and load the complete set of experimental conditions used for a given measurement, including all camera parameters and all spectrograph parameters Software can save data files containing complete metadata associated with a given acquisition, including camera parameters, spectrograph parameters, per-frame acquisition timing information, and post-processing history Software can record hardware timestamps for each frame to a resolution of 1 usec Software can perform automatic wavelength calibration by controlling the grating position and constructing wide-coverage calibration profiles Software can produce wide spectral range data by controlling the grating position and stitching the resulting spectra HOW TO RESPOND TO THIS NOTICE In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response. Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed at the bottom of this notice as soon as possible, and preferably before the closing date and time of this notice. Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI). Details about what your company is capable of providing that meets or exceeds NIST’s minimum requirements. Whether your company is an authorized reseller of the product or service being cited and evidence of such authorization. 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Questions should be submitted so that they are received by 9:00 a.m. Eastern Time on July 23, 2024. Questions will be anonymized and answered via sources sought notice amendment following the question submission deadline. IMPORTANT NOTES The information received in response to this notice will be reviewed and considered so that the NIST may appropriately solicit for its requirements in the near future. This notice should not be construed as a commitment by the NIST to issue a solicitation or ultimately award a contract. This notice is not a request for a quotation. Responses will not be considered as proposals or quotations. No award will be made as a result of this notice. NIST is not responsible for any costs incurred by the respondents to this notice. NIST reserves the right to use information provided by respondents for any purpose deemed necessary and appropriate. Thank you for taking the time to submit a response to this request.