Inactive

NIST Microsystems and Nanotechnology Division is seeking responsible parties to supply foundry fabrication services for microdevices. We are specifically looking for respondents capable of economicall... NIST Microsystems and Nanotechnology Division is seeking responsible parties to supply foundry fabrication services for microdevices. We are specifically looking for respondents capable of economically developing, implementing and providing low-volume microfabrication of 2D MEMS piston mirror array spatial light modulators (SLMs) according to NIST design and specifications. NIST is seeking to ultimately demonstrate a path to megapixel scale integrated CMOS-driven MEMS SLMs in the visible and near IR with pixel pitch of 10 micrometers or less. The minimum capabilities are as follows: Demonstrated capability of monolithic integration of MEMS with CMOS drive circuitry at wafer scale on 150 mm or larger diameter silicon wafers. Ability to offer MEMS development microfabrication runs whereby micromirror, actuator and actuator designs can be built on wiring layers and tested individually and in small 2D arrays with external drivers. The microfabrication process should be fully compatible with later CMOS integration. Ability to use high resolution commercial optical lithography tools to pattern structural features smaller than 200 nm. Electron beam lithography is explicitly excluded. Ability to make structural features out of low and controlled residual stress polysilicon, single crystal silicon or a similar material not subject to long-term and thermally-induced stress changes. This is required for precision analog actuation. The performer is initially expected to offer and provide a feasibility run implementing a wiring layer and MEMS SLM test devices and arrays and provide several wafers to NIST for evaluation. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 333242, as those domestic sources having 1,500 employees or less. Please include your company's size classification and socio-economic status in any response to this notice. Companies that can provide the required foundry services are requested to email a detailed response describing their abilities to Forest.crumpler@nist.gov no later than the response date for this sources sought notice. The response should include achievable specifications and any other information relevant to your product or capabilities. Point of Contact Forest Crumpler, Contracting Officer, Phone (301) 975-6753, Fax (301) 975-8753, Email forest.crumpler@nist.gov