The government is seeking quotations for a semiconductor-grade Process Residual Gas Analyzer (RGA) to support a CHIPS R&D Metrology program focused on digital twin technology for semiconductor manufacturing equipment. The RGA will serve as an online process diagnostic on flow systems, including an ALD reactor, to acquire process data on thin film growth using in situ and inline sensors. It must be compatible with low-volatility organometallic and metal halide precursors and process gases. This is a full and open competition under NAICS 334516.