This amendment clarifies requirements for an ALD batch reactor system to be delivered and operated at NIST. NIST will provide only the vacuum pump; the contractor must supply the ozone destruct and vented precursor cabinet, with utilities limited to power, compressed air, and carrier gas (no chilled water), and connections located about 36 inches away. Delivery is FOB destination at NIST shipping and receiving, with no contractor responsibility for uncrating, rigging, or final placement. NIST will furnish precursors and perform acceptance testing and metrology; the warranty is a minimum of one year after acceptance. The system must support four precursor sources plus ozone simultaneously, can process a single 200mm wafer, and NIST will provide and connect facility utilities, so the contractor is not responsible for external connections or welding.